Metrology for trace water in ultra-pure process gases
Trace water is the single largest matrix contaminant in ultra-high purity (UHP) process gases. Even though the manufacturing of UHP gases serves many of the key technology areas, such as high-value semiconductor manufacturing, trace water measurements are still lacking measurement traceability in the relevant ranges and matrix gases.
Funding entity:
Principal Investigator:
José Juan Segovia Puras
Professor of Thermodynamics
Mª Carmen Martín González
Professor of Thermodynamics
